SEMI C71 : 2021
Current
Current
The latest, up-to-date edition.
Specification and Guide for Boron Trichloride (BCI3)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry.
| DocumentType |
Revision
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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