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SEMI C71 : 2021

Current

Current

The latest, up-to-date edition.

Specification and Guide for Boron Trichloride (BCI3)

Available format(s)

Hardcopy

Language(s)

English

Published date

01-04-2021

The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry.

DocumentType
Revision
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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€139.95
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