SEMI C77 : 2012
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 NM AND 100 NM
Published date
12-01-2013
Sorry this product is not available in your region.
Contains the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2012)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SupersededBy |
| SEMI F63 : 2016 | GUIDE FOR ULTRAPURE WATER USED IN SEMICONDUCTOR PROCESSING |
| SEMI F104 : 2012 | PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS |
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