SEMI C77 : 2012
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 NM AND 100 NM
Published date
12-01-2013
Contains the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample.
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