SEMI C8.11 : 1998
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR N-METHYL-2-PYRROLIDONE, GRADE 3
01-03-2001
12-01-2013
Intended to establish the general procedures, specifications, definitions, and analytical procedures for n-Methyl-2- Pyrrolidone, Grade 3. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that given and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.