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SEMI C8-3 : 1996

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

GUIDELINE FOR HYDROFLUORIC ACID, TIER B

Superseded date

01-07-2004

Superseded by

SEMI C28 : 2011

Published date

12-01-2013

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Specific to hydrofluoric acid, Tier B. Tier B refers to second generation Guidelines. Tier B Guidelines are intended to describe the quality required to produce IC's whose critical dimensions lie in the range of 0.2 to 0.6 microns or greater. They are designated by "SEMI C8._", and in general become Grade 3 standards upon the approval of a validated analytical quality control method. Tier B Guidelines were developed by the North American Process Chemicals Committee, and approved through SEMI's International ballot methods.

DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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