SEMI C80 : 2014
Current
Current
The latest, up-to-date edition.
GUIDE FOR TETRAKIS(DIMETHYLAMINO) SILANE (TDMAS)
Published date
25-03-2013
Sorry this product is not available in your region.
Gives a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2013)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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