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SEMI C81 : 2013

SEMI C81 : 2013

Current

Current

The latest, up-to-date edition.

GUIDE FOR TRIS(DIMETHYLAMINO) SILANE (3DMAS)

Published date

25-03-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a guide for tris(dimethylamino) silane (3DMAS) for which a need has been identified.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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