SEMI C82 : 2013
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED 20 TO 50 NM WITH LIQUID-BORNE PARTICLE COUNTER
Published date
08-08-2013
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Gives a standard of monodispersed gold nanoparticle (GNP) challenge test for liquid filter rated 20 to 50 nm using optical liquid-borne particle counter.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI C89 : 2016 | TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED BELOW 30 NM WITH INDUCTIVELY COUPLED PLASMA - MASS SPECTROSCOPY (ICP-MS) |
| SEMI F63 : 2016 | GUIDE FOR ULTRAPURE WATER USED IN SEMICONDUCTOR PROCESSING |
| SEMI F110 : 2012 | TEST METHOD FOR MONO-DISPERSED POLYSTYRENE LATEX (PSL) CHALLENGE OF LIQUID FILTERS |
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