SEMI C82 : 2013
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED 20 TO 50 NM WITH LIQUID-BORNE PARTICLE COUNTER
Published date
08-08-2013
Gives a standard of monodispersed gold nanoparticle (GNP) challenge test for liquid filter rated 20 to 50 nm using optical liquid-borne particle counter.
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