SEMI C89 : 2016
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED BELOW 30 NM WITH INDUCTIVELY COUPLED PLASMA - MASS SPECTROSCOPY (ICP-MS)
Published date
26-01-2016
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Specifies a standard of mono-dispersed gold nanoparticle (GNP) challenge test for liquid filter rated below 30 nm using inductively coupled plasma-mass spectroscopy (ICP-MS).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2016)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI C79 : 2013 | GUIDE TO EVALUATE THE EFFICACY OF SUB-15 NM FILTERS USED IN ULTRAPURE WATER (UPW) DISTRIBUTION SYSTEMS |
| SEMI C82 : 2013 | TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED 20 TO 50 NM WITH LIQUID-BORNE PARTICLE COUNTER |
| SEMI F110 : 2012 | TEST METHOD FOR MONO-DISPERSED POLYSTYRENE LATEX (PSL) CHALLENGE OF LIQUID FILTERS |
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