SEMI C89 : 2016
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED BELOW 30 NM WITH INDUCTIVELY COUPLED PLASMA - MASS SPECTROSCOPY (ICP-MS)
Published date
26-01-2016
Specifies a standard of mono-dispersed gold nanoparticle (GNP) challenge test for liquid filter rated below 30 nm using inductively coupled plasma-mass spectroscopy (ICP-MS).
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