SEMI C9.1 : 2012
Current
Current
The latest, up-to-date edition.
GUIDE FOR ANALYSIS OF UNCERTAINTIES IN GRAVIMETRICALLY PREPARED GAS MIXTURES
Published date
12-01-2013
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Specifies the minimum criteria for the analysis of uncertainty associated with preparation and use of gravimetric gas mixtures used for calibrating analytical instruments to determine whether various SEMI impurity specification are satisfied.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI F33 : 2008 | TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS) |
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