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SEMI C9.1 : 2012

SEMI C9.1 : 2012

Current

Current

The latest, up-to-date edition.

GUIDE FOR ANALYSIS OF UNCERTAINTIES IN GRAVIMETRICALLY PREPARED GAS MIXTURES

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the minimum criteria for the analysis of uncertainty associated with preparation and use of gravimetric gas mixtures used for calibrating analytical instruments to determine whether various SEMI impurity specification are satisfied.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI F33 : 2008 TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)

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