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GUIDE FOR DETERMINING THE QUALITY OF ION EXCHANGE RESIN USED IN POLISH APPLICATIONS OF ULTRAPURE WATER SYSTEM
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Superseded date: 05-10-2020
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Published date: 08-03-2016
Publisher: Semiconductor Equipment & Materials Institute
Specifies a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications.
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