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  • SEMI F57 : 2014

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    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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    SPECIFICATION FOR POLYMER MATERIALS AND COMPONENTS USED IN ULTRA PURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS

    Available format(s): 

    Superseded date:  05-10-2020

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Defines minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultra pure water (UPW) in UPW distribution systems.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Superseded
    Superseded By

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI F61 : 2017 GUIDE TO DESIGN AND OPERATION OF A SEMICONDUCTOR ULTRAPURE WATER SYSTEM
    SEMI C69 : 2015 TEST METHOD FOR THE DETERMINATION OF SURFACE AREAS OF POLYMER PELLETS
    SEMI C79 : 2013 GUIDE TO EVALUATE THE EFFICACY OF SUB-15 NM FILTERS USED IN ULTRAPURE WATER (UPW) DISTRIBUTION SYSTEMS
    SEMI F39 : 2015 GUIDELINE FOR CHEMICAL BLENDING SYSTEMS
    SEMI F75 : 2017 GUIDE FOR QUALITY MONITORING OF ULTRAPURE WATER USED IN SEMICONDUCTOR MANUFACTURING
    SEMI F51 : 2017 GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY
    SEMI C93 : 2017 GUIDE FOR DETERMINING THE QUALITY OF ION EXCHANGE RESIN USED IN POLISH APPLICATIONS OF ULTRAPURE WATER SYSTEM
    SEMI F108 : 2010 GUIDE FOR INTEGRATION OF LIQUID CHEMICAL PIPING COMPONENTS FOR SEMICONDUCTOR, FLAT PANEL DISPLAY, AND SOLAR CELL MANUFACTURING APPLICATIONS
    SEMI F41 : 2016 GUIDE FOR QUALIFICATION OF A BULK CHEMICAL DISTRIBUTION SYSTEM USED IN SEMICONDUCTOR PROCESSING
    SEMI F104 : 2012 PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
    SEMI C90 : 2015 TEST METHOD AND SPECIFICATION FOR TESTING PERFLUOROALKOXY (PFA) MATERIALS USED IN LIQUID CHEMICAL DISTRIBUTION SYSTEMS
    SEMI E49.7 : 2004E PURITY GUIDE FOR THE DESIGN AND MANUFACTURE OF ULTRAPURE WATER AND LIQUID CHEMICAL SYSTEMS IN SEMICONDUCTOR PROCESS EQUIPMENT

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI F40-0699E(R2018) PRACTICE FOR PREPARING LIQUID CHEMICAL DISTRIBUTION COMPONENTS FOR CHEMICAL TESTING
    SEMI F61 : 2017 GUIDE TO DESIGN AND OPERATION OF A SEMICONDUCTOR ULTRAPURE WATER SYSTEM
    SEMI F104 : 2012 PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS
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