• SEMI D12 : 1995(R2003)

    Current The latest, up-to-date edition.

    SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Specifies various aspects of the edges of a flat panel display substrate and describes their relationships. Assuming the existence of terminology described in other SEMI flat panel display documents. Applicable to substrates where the nominal thickness specification is 1.1 mm. The edges of a flat panel display substrate are important in both the specifications for and uses of the material. Effecting the means for making, handling, storing and processing substrates. Specifying the terminology and the geometric properties of these edges will help both the producers and users of substrates and processing/inspection equipment.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES
    SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
    SEMI D5 : 1994(R2003) STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES
    SEMI T8 : 2010 SPECIFICATION FOR MARKING OF GLASS FLAT PANEL DISPLAY SUBSTRATES WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
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