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  • SEMI D5 : 1994(R2003)

    Current The latest, up-to-date edition.

    STANDARD SIZE FOR FLAT PANEL DISPLAY SUBSTRATES

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Describes the specification of nominal edge length and thickness and related tolerances of a flat panel display substrate which apply to substrates mainly used in fabrication AMLCD displays. May also apply to substrates for other display types. The edge lengths specified range from 300 x 300 mm to 500 x 500 mm. A single thickness, 1.1 mm, applies to all substrates.

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    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES
    SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
    SEMI D16 : 1998 SPECIFICATION FOR MECHANICAL INTERFACE BETWEEN FLAT PANEL DISPLAY MATERIAL HANDLING SYSTEM AND TOOL PORT
    SEMI D10 : 1995(R2003) TEST METHOD FOR CHEMICAL DURABILITY OF FLAT PANEL DISPLAY GLASS SUBSTRATES
    SEMI D11 : 1995(R2009) SPECIFICATION FOR FLAT PANEL DISPLAY GLASS SUBSTRATE CASSETTES
    SEMI D18 : 1999E SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI D4 : 1994 METHOD FOR REFERENCING FLAT PANEL DISPLAY SUBSTRATES
    SEMI D3 : 1991(R2009) QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES
    SEMI D12 : 1995(R2003) SPECIFICATION FOR EDGE CONDITION OF FLAT PANEL DISPLAY (FPD) SUBSTRATES
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