SEMI D15 : 1996(R2003)
Current
Current
The latest, up-to-date edition.
FPD GLASS SUBSTRATE SURFACE WAVINESS MEASUREMENT METHOD
Published date
12-01-2013
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Covering the measurement of FPD glass substrate surface waviness by measuring instruments employing mechanical stylus, optical stylus, and optical interferometric measurement procedures. It is applicable to use this method for the documentation of waviness of all types of glass substrates used for flat panel displays.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| BS IEC 62899-301-1:2017 | Printed electronics Equipment. Contact printing. Rigid master. Measurement method of plate master external dimension |
| 14/30317961 DC : 0 | BS EN 62903-1 ED.1 - PRINTED ELECTRONICS - EQUIPMENT - CONTACT PRINTING - RIGID MASTER - MEASUREMENT METHOD OF PLATE MASTER EXTERNAL DIMENSION |
| IEC 62899-301-1:2017 | Printed electronics - Part 301-1: Equipment - Contact printing - Rigid master - Measurement method of plate master external dimension |
| SEMI D4 : 1994 | METHOD FOR REFERENCING FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D3 : 1991(R2009) | QUALITY AREA SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATES |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
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