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SEMI D20 : 2006(R2015)

Current

Current

The latest, up-to-date edition.

TERMINOLOGY FOR FPD MASK DEFECT

Published date

12-01-2013

Describes defect terminology for FPD masks.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D13 : 2008(R2013) TERMINOLOGY FOR FPD COLOR FILTERS ASSEMBLIES

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