SEMI D20 : 2006(R2015)
Current
Current
The latest, up-to-date edition.
TERMINOLOGY FOR FPD MASK DEFECT
Published date
12-01-2013
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Describes defect terminology for FPD masks.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D13 : 2008(R2013) | TERMINOLOGY FOR FPD COLOR FILTERS ASSEMBLIES |
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