SEMI D32 : 2003(R2009)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION
Published date
12-01-2013
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Describes the location, dimensions, and message size of the marking symbol that consists of a two-dimensional code symbol and related alpha numeric characters (capable of being read visually through the reader camera and display) and is located outside of the quality area of glass flat panel display (FPD) substrate.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2003) Also available in CD-ROM. (07/2009)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
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SEMI D52 : 2008E | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID |
SEMI D48 : NOV 2007 | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL |
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