SEMI D37 : 2004
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) PELLICLES
Published date
12-01-2013
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Specifies standard outer and inner dimensions, stand off, minimum transmittance, and strength of pellicle film used for masks. These dimensions apply to pellicle for masks that are principally used in fabricating liquid crystal displays. The mask size specifies range from 330 x 450 mm to 520 x 800 mm.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI (02/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI D6 : 2011(R2017) | SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES |
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