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SEMI D38 : 2011

Current

Current

The latest, up-to-date edition.

GUIDE FOR QUALITY AREA OF LCD MASKS

Published date

12-01-2013

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Pertains to masks that are principally used in fabricating liquid crystal displays.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI (02/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D6 : 2011(R2017) SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES
SEMI P1 : 2008E SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES

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