SEMI D38 : 2011
Current
Current
The latest, up-to-date edition.
GUIDE FOR QUALITY AREA OF LCD MASKS
Published date
12-01-2013
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Pertains to masks that are principally used in fabricating liquid crystal displays.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI (02/2004)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D6 : 2011(R2017) | SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES |
| SEMI P1 : 2008E | SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES |
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