SEMI D40 : 2004
Current
Current
The latest, up-to-date edition.
TERMINOLOGY FOR FPD SUBSTRATE DEFLECTION
Published date
12-01-2013
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Provides the terms and definitions of a physical transformation when flat panel display (FPD) substrates are maintained statically. These terms and definitions are applicable to both front and back substrates used in FPD fabrication.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
|
SEMI D25 : 2000E(R2006) | SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATE SHIPPING CASE |
SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
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