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SEMI D40 : 2004

SEMI D40 : 2004

Current

Current

The latest, up-to-date edition.

TERMINOLOGY FOR FPD SUBSTRATE DEFLECTION

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides the terms and definitions of a physical transformation when flat panel display (FPD) substrates are maintained statically. These terms and definitions are applicable to both front and back substrates used in FPD fabrication.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D25 : 2000E(R2006) SPECIFICATION FOR FLAT PANEL DISPLAY SUBSTRATE SHIPPING CASE
SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES

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