SEMI D49 : 2007
Current
Current
The latest, up-to-date edition.
SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION
Published date
12-01-2013
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Specifies only the orientation of single substrate in loading/unloading into/from AMHS and equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (06/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI D48 : NOV 2007 | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
| SEMI D44 : 2006E | SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL |
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