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SEMI D49 : 2007

SEMI D49 : 2007

Current

Current

The latest, up-to-date edition.

SPECIFICATION OF SINGLE SUBSTRATE ORIENTATION FOR LOADING/UNLOADING INTO/FROM EQUIPMENT TO SPECIFY ID READER POSITION

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies only the orientation of single substrate in loading/unloading into/from AMHS and equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (06/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI D48 : NOV 2007 SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL
SEMI D24 : 2000(R2006) SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS
SEMI D9 : 2003(R2015) TERMINOLOGY FOR FPD SUBSTRATES
SEMI D44 : 2006E SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL

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