SEMI D51 : 2009
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR HANDSHAKE METHOD OF SINGLE SUBSTRATE FOR HANDLING OFF/ON TOOL IN FPD PRODUCTION
Published date
12-01-2013
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Specifies the handshake methods for transferring single substrates, which are currently different at each FPD fab. It is expected that this will result in improved efficiency in the design, production and installation of equipment, as well as in cost reduction.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM format. (02/2008)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI D54 : 2009E | SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD) |
| SEMI D44 : 2006E | SPECIFICATION FOR REFERENCE POSITION OF SINGLE SUBSTRATE FOR HANDING OFF ON TOOL |
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