SEMI D52 : 2008E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID
Published date
12-01-2013
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Describes the substrate ID positioning with 2D Code.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (06/2008) E = This standard was editorially modified to correct an error. (12/2009)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI D32 : 2003(R2009) | SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION |
| SEMI D48 : NOV 2007 | SPECIFICATION FOR REFERENCE POSITION OF SUBSTRATE ID TO SPECIFY DATUM LINE FOR ID READER FOR HANDING OFF/ON TOOL |
| SEMI D24 : 2000(R2006) | SPECIFICATION FOR GLASS SUBSTRATES USED TO MANUFACTURE FLAT PANEL DISPLAYS |
| SEMI D9 : 2003(R2015) | TERMINOLOGY FOR FPD SUBSTRATES |
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