SEMI D53 : 2008(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) PELLICLES
Published date
12-01-2013
Superseded date
07-06-2021
Superseded by
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Describes standard stand off, transmittance, and strength of pellicle films used for masks.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2008)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI D6 : 2011(R2017) | SPECIFICATION FOR LIQUID CRYSTAL DISPLAY (LCD) MASK SUBSTRATES |
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