![header thumbnail](/images/publishers\semi_cover.gif)
SEMI D53 : 2021
Current
Current
The latest, up-to-date edition.
![header thumbnail](/images/publishers\semi_cover.gif)
Specification for Flat Panel Display (FPD) Pellicles
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2021
This Specification defines standard stand off, transmittance, and strength of pellicle films used for masks.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.