SEMI D54 : 2009E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD)
Published date
12-01-2013
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Specifies communication between host and equipment at the transfer points where substrates are transferred into/out of the equipment at FPD fabs.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (07/2009) E = This standard was editorially modified in October 2009 to correct editorial errors. (12/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E41 : 1995 | EXCEPTION MANAGEMENT (EM) STANDARD |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
| SEMI E53 : 2004 | EVENT REPORTING |
| SEMI D51 : 2009 | SPECIFICATION FOR HANDSHAKE METHOD OF SINGLE SUBSTRATE FOR HANDLING OFF/ON TOOL IN FPD PRODUCTION |
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