SEMI D9:2003(R2021)
Current
Current
The latest, up-to-date edition.
Terminology for FPD Substrates
Available format(s)
Hardcopy
Language(s)
English
Published date
01-03-2021
This Document provides terms and definitions of materials and defects within and on the surface of flat panel display (FPD) substrates and of dimensional, thermal, chemical, optical, and mechanical properties of FPD substrates.
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