SEMI E10:2022
Current
Current
The latest, up-to-date edition.
Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
Published date
01-04-2022
Sorry this product is not available in your region.
This Specification provides a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment.
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E140:2022 | Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
Summarise
Access your standards online with a subscription
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.
Sorry this product is not available in your region.