SEMI E10:2022
Current
Current
The latest, up-to-date edition.
Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
Published date
01-04-2022
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This Specification provides a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment.
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI E140:2022 | Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
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