SEMI E102 : 2000(R2006)
Current
Current
The latest, up-to-date edition.
PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL TRANSPORT AND STORAGE COMPONENT
Published date
12-01-2013
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Provides specification Factory Operations, Material Transport and Storage, Production Machine, and Equipment Tracking and Maintenance components by ordering, in time, jobs that process material on equipment, move material, and maintain equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (07/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
| SEMI E105 : 2001 | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK SCHEDULING COMPONENT |
| SEMI E81 : 2000(R2007) | PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN ARCHITECTURE |
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