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SEMI E114 : 2002E(R2016)

SEMI E114 : 2002E(R2016)

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR RF CABLE ASSEMBLIES USED IN SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a test method used to determine the electrical length, power losses, and characteristic impedance variation of RF cable assemblies used in RF power delivery systems for semiconductor processing equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2002) E = Editorially modified to correct an error. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E143 : 2006(R2018) TEST METHOD FOR MEASURING POWER AND VARIATION INTO A 50-OHM LOAD AND POWER VARIATION AND SPECTRUM INTO A LOAD WITH A VSWR OF 2.0 AT ANY PHASE ANGLE
SEMI E136 : 2004(R2018) TEST METHOD FOR DETERMINING THE OUTPUT POWER OF RF GENERATORS USED IN SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS
SEMI E113 : 2006(R2018) SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS

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