SEMI E115 : 2002E(R2016)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING THE LOAD IMPEDANCE AND EFFICIENCY OF MATCHING NETWORKS USED IN SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS
Published date
12-01-2013
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Specifies a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2002) E = Editorially modified to correct an error. Also available in CD-ROM. (02/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E113 : 2006(R2018) | SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS |
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