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SEMI E115 : 2002E(R2016)

SEMI E115 : 2002E(R2016)

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR DETERMINING THE LOAD IMPEDANCE AND EFFICIENCY OF MATCHING NETWORKS USED IN SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (12/2002) E = Editorially modified to correct an error. Also available in CD-ROM. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E113 : 2006(R2018) SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT RF POWER DELIVERY SYSTEMS

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