SEMI E116.1 : 2007
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-2 PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT)
Published date
12-01-2013
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Maps the services and data of the Equipment Performance Tracking Standard (EPT) to SECS-II streams, functions, and data definitions. Also applies to all implementations of EPT that use the SECS-II message protocol [SEMI E5].
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2003) Also available in CD-ROM format. (07/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E116 : 2017 | SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
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