SEMI E12:2021
Current
Current
The latest, up-to-date edition.
Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2021
€125.00
Excluding VAT
In the past, confusion has existed in the values of standard temperature and standard pressure when gas flow is expressed in ‘standard’ volumetric units.
| DocumentType |
Revision
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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