SEMI E120:2022(R2023)
Current
Current
The latest, up-to-date edition.
Specification for the Common Equipment Model (CEM)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-08-2023
€141.67
Excluding VAT
The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment structure and related elements.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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