SEMI E122.1 : 2003(R2009)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-2 PROTOCOL FOR TESTER SPECIFIC EQUIPMENT MODEL (TSEM)
Published date
12-01-2013
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Describes the services and data of SEMI E122 to SECS-II streams and functions, and data definitions.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E122. (08/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E122 : 2017 | SPECIFICATION FOR TESTER EQUIPMENT SPECIFIC EQUIPMENT MODEL (TSEM) |
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