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SEMI E122 : 2017

SEMI E122 : 2017

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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SPECIFICATION FOR TESTER EQUIPMENT SPECIFIC EQUIPMENT MODEL (TSEM)

Superseded date

15-07-2023

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes testing equipment requirements and capabilities in the areas of the processing state model, collection events, alarm documentation, remote commands, variable items, and process program management.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI E30.3. Includes SEMI E122.1. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI E122.1 : 2003(R2009) SPECIFICATION FOR SECS-2 PROTOCOL FOR TESTER SPECIFIC EQUIPMENT MODEL (TSEM)

SEMI E37.1 : 2002(R2013) HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS)
SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

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