SEMI E122 : 2017
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR TESTER EQUIPMENT SPECIFIC EQUIPMENT MODEL (TSEM)
Superseded date
15-07-2023
Superseded by
Published date
12-01-2013
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Describes testing equipment requirements and capabilities in the areas of the processing state model, collection events, alarm documentation, remote commands, variable items, and process program management.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI E30.3. Includes SEMI E122.1. (02/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
| SEMI E122.1 : 2003(R2009) | SPECIFICATION FOR SECS-2 PROTOCOL FOR TESTER SPECIFIC EQUIPMENT MODEL (TSEM) |
| SEMI E37.1 : 2002(R2013) | HIGH-SPEED SECS MESSAGE SERVICES SINGLE SELECTED-SESSION MODE (HSMS-SS) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
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