Name: SEMI E123.1 : 2003(R2009)
Brand: SEMI
Availability: InStock

SPECIFICATION FOR SECS-2 PROTOCOL FOR HANDLER SPECIFIC EQUIPMENT MODEL (HSEM)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Represents the services and data of SEMI E123 to SECS-II streams and functions, and data definitions. Also pertains to all implementations of SEMI E123 that use the SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E123 and SEMI E5.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E123. (12/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E123 : 2017	SPECIFICATION FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM)
SEMI E37 : 2013	HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES

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SEMI E123.1 : 2003(R2009)

SPECIFICATION FOR SECS-2 PROTOCOL FOR HANDLER SPECIFIC EQUIPMENT MODEL (HSEM)

Abstract

General Product Information

Standards Referencing This Book

Category

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