SEMI E123.1 : 2003(R2009)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR SECS-2 PROTOCOL FOR HANDLER SPECIFIC EQUIPMENT MODEL (HSEM)
Published date
12-01-2013
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Represents the services and data of SEMI E123 to SECS-II streams and functions, and data definitions. Also pertains to all implementations of SEMI E123 that use the SECS-II message protocol (SEMI E5). Compliance to this standard requires compliance to both SEMI E123 and SEMI E5.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Not available separately, included in SEMI E123. (12/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E123 : 2017 | SPECIFICATION FOR HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
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