SEMI E128:2014(R2024)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for XML Message Structures
Hardcopy
10-06-2024
English
01-02-2024
This Standard specifies XML structures required to encode message header or ‘envelope’ information for synchronous and asynchronous messages.
DocumentType |
Standard
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Pages |
0
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Superseded
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SupersededBy | |
Supersedes |
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