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SEMI E128:2014(R2024)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for XML Message Structures

Available format(s)

Hardcopy

Superseded date

10-06-2024

Superseded by

SEMI E128:2024

Language(s)

English

Published date

01-02-2024

€161.52
Excluding VAT

This Standard specifies XML structures required to encode message header or ‘envelope’ information for synchronous and asynchronous messages.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

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