SEMI E132.2:2024
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)
Available format(s)
Hardcopy
Superseded date
15-10-2024
Superseded by
Language(s)
English
Published date
01-06-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.The scope of this Specification is the faithful representation of the messages and services to support SEMI E132 with gRPC and Protocol Buffers.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E179:2022-08 | Specification for Protocol Buffers Common Components |
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