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SEMI E132.2:2024

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)

Available format(s)

Hardcopy

Superseded date

15-10-2024

Superseded by

SEMI E132.2:2024-09

Language(s)

English

Published date

01-06-2024

€161.52
Excluding VAT

The scope of this Specification is the faithful representation of the messages and services to support SEMI E132 with gRPC and Protocol Buffers.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI E179:2022-08 Specification for Protocol Buffers Common Components

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