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SEMI E133:2018(R2024)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for Automated Process Control Systems Interface

Available format(s)

Hardcopy

Superseded date

10-06-2024

Superseded by

SEMI E133:2024

Language(s)

English

Published date

01-03-2024

€161.52
Excluding VAT

In order to more efficiently facilitate the integration of process control systems (PCS) such as run-to-run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including equipment data collection).

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI E134:2022 Specification for Data Collection Management

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