SEMI E133:2018(R2024)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Automated Process Control Systems Interface
Hardcopy
10-06-2024
English
01-03-2024
In order to more efficiently facilitate the integration of process control systems (PCS) such as run-to-run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including equipment data collection).
DocumentType |
Standard
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Pages |
0
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Superseded
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SupersededBy | |
Supersedes |
SEMI E134:2022 | Specification for Data Collection Management |
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