SEMI E133:2024
Current
The latest, up-to-date edition.
Specification for Automated Process Control Systems Interface
Hardcopy
English
01-05-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.In order to more efficiently facilitate the integration of process control systems (PCS) such as run-to-run (R2R) control, fault detection (FD), fault classification (FC), fault prediction (FP), statistical process control (SPC), etc. into current and future fabs, there is a need to define interfaces for PCS that enable them to interact effectively and share data (1) among themselves and (2) with the other interdependent factory systems (including equipment data collection).
| DocumentType |
Standard
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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