SEMI E134:2019
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Data Collection Management
Hardcopy
07-11-2022
English
06-04-2019
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer.
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Revision
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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