SEMI E134:2022
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Specification for Data Collection Management
Hardcopy
15-10-2024
English
01-10-2022
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification describes a method for data acquisition EDA Applications to request process and data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the EDA Application.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI E133:2018(R2024) | Specification for Automated Process Control Systems Interface |
| SEMI E132:2019 | Specification for Equipment Client Authentication and Authorization |
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