SEMI E134:2022
Current
Current
The latest, up-to-date edition.
Specification for Data Collection Management
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2022
This Specification describes a method for data acquisition EDA Applications to request process and data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the EDA Application.
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