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SEMI E134:2024

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Specification for Data Collection Management

Available format(s)

Hardcopy

Superseded date

15-10-2024

Superseded by

SEMI E134:2024-09

Language(s)

English

Published date

01-06-2024

€161.52
Excluding VAT

This Specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan.S

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI E132:2022-09 Specification for Equipment Client Authentication and Authorization

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