SEMI E135:2018(R2024)
Current
Current
The latest, up-to-date edition.
Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
Available format(s)
Hardcopy
Language(s)
English
Published date
01-03-2024
This Standard defines a test method used to determine the transient response for a radio frequency (RF) generator used in RF power delivery systems for semiconductor processing equipment to support SEMI E113.
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