SEMI E138:2019(R2024)
Current
Current
The latest, up-to-date edition.
Specification for XML Semiconductor Common Components
Available format(s)
Hardcopy
Language(s)
English
Published date
01-02-2024
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards.
| DocumentType |
Standard
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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