SEMI E140 : 2012
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR GAS DELIVERY SYSTEMS
Superseded date
09-11-2018
Superseded by
Published date
12-01-2013
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Gives standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of gas delivery systems in the semiconductor and related industries.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI E72 : 2016 | SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT |
| SEMI E35 : 2012 | GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
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